high-energy ion implantation
- high-energy ion implantation
- didelės energijos jonų implantavimas
statusas T sritis radioelektronika
atitikmenys: angl. high-energy ion implantation
vok. energiereiche Ionenimplantierung, f; Implantierung von Ionen hoher Energie, f
rus. имплантация ионов высокой энергии, f
pranc. implantation d'ions à grande énergie, f
Radioelektronikos terminų žodynas. – Vilnius : BĮ UAB „Litimo“.
Kazimieras Gaivenis, Gytis Juška, Vidas Kalesinskas.
2000.
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